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Method and apparatus for accessing a process chamber with a dual-zone gas injector with an improved optical access type
Method and apparatus for accessing a process chamber with a dual-zone gas injector with an improved optical access type
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机译：用具有改进的光学访问类型的双区域气体注射器访问处理室的方法和设备
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摘要
Into the process chamber A1 A injector provides optical access to the axial passage through the optical access window diagnosis end outside the process chamber. Receives a process gas first and second hollow body casing surrounds the axial passage. To minimize the generation of particles, and is prompted for the case body, a sleeve within the body of the case defines the gas holes of first injecting a first process gas into the process chamber. To inject the second process gas into the process chamber, gas in the second bore of the sleeve, makes it possible to surround the axial passage, the optical signal has a signal-to-noise ratio of the desired (SNR) at the end . By providing a septum in the hole in the second method, so as to reduce the deposition on the optical access window on etching and optical access window and to maintain the desired SNR in the diagnosis end, a second hole I is divided into the aperture that is configured to. [Selection Figure] Figure 3A
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