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Implication the component which possesses the property which the hydrogen atom detection device and manner, the thin film device production device
Implication the component which possesses the property which the hydrogen atom detection device and manner, the thin film device production device
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机译：蕴含具有氢原子检测装置和方式，薄膜装置生产装置的性能的组件
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摘要
PROBLEM TO BE SOLVED: To provide a hydrogen atom detecting apparatus for detecting hydrogen atoms, to provide the hydrogen atom detecting apparatus and a method for easily and accurately monitoring the state of processes in membrane device manufacturing equipment which utilizes the atomic hydrogen, and to provide the membrane device manufacturing equipment and a method and a hydrogen atom monitoring method.;SOLUTION: A vacuum chamber 2 is provided with an atomic hydrogen generating part having a tungsten wire 5 of a high-melting point metal. A hydrogen atom detecting element is arranged inside the vacuum chamber 2 for detecting hydrogen atoms. The element is made of a multi-component based glass containing at least one oxide selected from among TiO2, Nb2O5, and WO3.;COPYRIGHT: (C)2006,JPO&NCIPI
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机译：解决的问题：提供一种用于检测氢原子的氢原子检测装置，一种氢原子检测装置以及一种用于容易且准确地监测利用原子氢的膜装置制造设备中的工艺状态的方法，并提供解决方案：真空室2设有原子氢产生部分，该原子氢产生部分具有高熔点金属的钨丝5。氢原子检测元件布置在真空室2内以检测氢原子。该元件由包含至少一种选自TiO 2 ，Nb 2 O 5 和WO的氧化物的多组分玻璃制成。 3 .;版权所有：（C）2006，JPO＆NCIPI
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