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Out-of-plane operation method of thermal MEMS actuator and thermal MEMS actuator
Out-of-plane operation method of thermal MEMS actuator and thermal MEMS actuator
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机译：热MEMS致动器的面外操作方法和热MEMS致动器
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摘要
PROBLEM TO BE SOLVED: To provide a thermal MEMS actuator capable of out-of-plane motion and driven by Joule heating.;SOLUTION: The out-of-plane thermal buckle beam MEMS actuator 50 is formed on a substrate of semiconductor material. The actuator 50 includes a first anchor 52, a second anchor 54 and a plurality of thermal buckle beams 56. The buckle beams are formed of the semiconductor material. The buckling beams are coupled by a pivot frame 64 including a frame base 66 fixed to each buckle beam and at least one pivot arm 72 coupled to the frame base 66 at one end and including a free end that pivots out-of-plane when the actuator 50 is driven. A cyclic current source 80 sends a cyclic electrical current into the thermal buckle beams causing thermal expansion of the buckle beams and cyclic buckling motion of the buckle beams in a direction away from the substrate.;COPYRIGHT: (C)2003,JPO
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