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Equipment and vector polarization measurement method to analyze the three-dimensional electromagnetic field resulting from the interaction between the sample to be observed with focused illumination field
Equipment and vector polarization measurement method to analyze the three-dimensional electromagnetic field resulting from the interaction between the sample to be observed with focused illumination field
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机译：设备和矢量极化测量方法，用于分析由待观察样品与聚焦照明场之间的相互作用产生的三维电磁场
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摘要
A method and apparatus for analysing the three-dimensional electromagnetic beam resulting from an interaction between a focused illuminating beam and a sample to be observed, by characterising the distribution of the state of polarisation of light across a measurement plane, the method comprising the steps of generating a beam of illuminating light; controlling the state of polarisation at different positions across the beam width of the light beam; focussing said illuminating light beam to a focus, wherein said focus is a tight focus and said focused light has a suitable three-dimensional vectorial structure at the focus; detecting and measuring the state of polarisation of the reflected light at different positions across the width of the measurement plane to retrieve information on the three dimensional vectorial electromagnetic interaction of the illuminated focused field and the sample.
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