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OPTICAL GRID AND ITS MANUFACTURING METHOD, LINEAR ENCODER EQUIPPED WITH OPTICAL GRID, AND OPTICAL MICROSCOPE
OPTICAL GRID AND ITS MANUFACTURING METHOD, LINEAR ENCODER EQUIPPED WITH OPTICAL GRID, AND OPTICAL MICROSCOPE
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机译：光学格栅及其制造方法，装有光学格栅的线性编码器和光学显微镜
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摘要
PROBLEM TO BE SOLVED: To provide an optical grid having stable scale accuracy.;SOLUTION: A manufacturing method of the optical grid includes: a first film forming process (S100) forming the first film 12 composed of a material having an releasable aromatic ring capable of being charged into a free radical with light at least on one surface of a glass substrate 10; an exposing process (S102) exposing in a grid form on the first film 12 using a wavelength with which the aromatic ring can be released as a free radical; a water washing process (S104) washing the surface of the exposed first film 12 with water and exposing the hydroxyl group 16 at the exposed portion; a second film forming process (106) forming the second film 18 by coating and reacting a material having an amino group which is reactive with the hydroxy group exposed in a lattice form on the surface of the first film 12 with water washing; a catalyst nuclei supplying process supplying a catalyst nuclei to the second film 18 to form a catalyst nuclei layer; and a light reflection layer forming process (S110) forming a light reflection layer on the catalyst nuclei layer with electroless plating.;COPYRIGHT: (C)2010,JPO&INPIT
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