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FRONT AND REAR SURFACE MEASURING PROBE, FRONT AND REAR SURFACE MEASURING INSTRUMENT, AND METHOD FOR MEASURING FRONT AND REAR SURFACE
FRONT AND REAR SURFACE MEASURING PROBE, FRONT AND REAR SURFACE MEASURING INSTRUMENT, AND METHOD FOR MEASURING FRONT AND REAR SURFACE
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机译：前表面和后表面测量探头，前表面和后表面测量仪器以及前表面和后表面的测量方法
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摘要
PROBLEM TO BE SOLVED: To provide a front and rear surface measuring probe, a front and rear surface measuring instrument, and a method for measuring front and rear surfaces, for highly accurately measuring the front and rear surfaces of a measuring object by one probe independently of the shapes of the front and rear surfaces of the measuring object.;SOLUTION: This front and rear surface measuring probe includes a probe body 10, a detection shaft 20 comprising contacts 22 and 23 at both ends thereof, a guide mechanism 30 supporting the detection shaft 20 so as to allow it to move axially of the detection shaft 20 relative to the probe body 10, a drive mechanism 40 for axially moving the detection shaft 20, and a position detection means 50 for detecting a moving position of the detection shaft 20 coaxially with the detection shaft 20.;COPYRIGHT: (C)2010,JPO&INPIT
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