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LOCAL AREA TEMPERATURE MEASURING DEVICE FOR FOCUSED ION-BEAM DEVICE, AND TEMPERATURE MEASURING METHOD IN LOCAL AREA
LOCAL AREA TEMPERATURE MEASURING DEVICE FOR FOCUSED ION-BEAM DEVICE, AND TEMPERATURE MEASURING METHOD IN LOCAL AREA
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机译：聚焦离子束装置的局部温度测量装置及局部温度测量方法
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摘要
PROBLEM TO BE SOLVED: To provide a local area temperature measuring device for a focused ion-beam device and a temperature measuring method in a local area capable of accurately measuring the temperature in a microscopic region adjoining to a measuring eyesight.;SOLUTION: The local area temperature measuring device for a focused ion-beam device is equipped at least with a contact-type temperature measuring unit capable of being mounted to and dismounted from the focused ion-beam device having a beam-assist depositional function, and mounted on the extremity of a holder in the local area temperature measuring device; an insulating guide to protect the contact-type temperature measuring unit; and a fine drive controller to expose the contact-type temperature measuring unit from the insulating guide. Further, the method is also provided for measuring the temperature in the local area using the local area temperature measuring device for the focused ion-beam device.;COPYRIGHT: (C)2010,JPO&INPIT
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