首页> 外国专利> Device i.e. robot-controlled handling device, for handling plate-shaped substrates in manufacturing plant, has manifold effector comprising end effectors, where substrates are simultaneously received and transported by end effectors

Device i.e. robot-controlled handling device, for handling plate-shaped substrates in manufacturing plant, has manifold effector comprising end effectors, where substrates are simultaneously received and transported by end effectors

机译:设备,即用于在制造工厂中处理板状基板的机器人控制的处理设备,具有包括末端执行器的歧管效应器,其中基板由末端执行器同时接收和运输

摘要

The device (1) has a manifold effector (4) comprising multiple end effectors (8a-8c). Multiple substrates (2) are simultaneously received and transported by the end effectors, where the substrates are supported at respective end effectors in a horizontal retaining plane or a vertical retaining plane. The end effectors are arranged at a specific distance to each other. The manifold effector comprises an actuating unit i.e. drive, to adjust distance between the end effectors. The actuating unit is integrated in a retainer of the manifold effector.
机译:装置(1)具有包括多个末端执行器(8a-8c)的歧管执行器(4)。多个基板(2)由末端执行器同时接收和运输,其中基板在相应的末端执行器处支撑在水平保持平面或垂直保持平面中。末端执行器彼此之间以特定距离布置。歧管执行器包括致动单元,即驱动器,以调节端部执行器之间的距离。致动单元集成在歧管执行器的固定器中。

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