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An electronic industrial plant and method for operating an electronic industrial plant
An electronic industrial plant and method for operating an electronic industrial plant
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机译:电子工业工厂和用于操作电子工业工厂的方法
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摘要
An electronic industrial plant has a production unit (200) for producing a semiconductor product and a cryogenic air separation unit (100). The cryogenic air separation unit is sampled from a nitrogen product stream (110), a pure oxygen product stream (120), and a non-pure oxygen product stream (130). The three product streams (110, 120, 130) are sent to the production unit.
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