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ELECTRODE STRUCTURE FOR MICROMECHANICAL GYROSCOPE AND MICROMECHANICAL GYROSCOPE WITH SUCH STRUCTURE (VERSIONS)
ELECTRODE STRUCTURE FOR MICROMECHANICAL GYROSCOPE AND MICROMECHANICAL GYROSCOPE WITH SUCH STRUCTURE (VERSIONS)
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机译：微机械陀螺的电极结构和具有这种结构的微机械陀螺（版本）
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摘要
FIELD: physics; measurement.;SUBSTANCE: present invention pertains to devices for measuring angular velocity, and in particular, to micromechanical gyroscopes. In the electrode structure of a micromechanical gyroscope, comprising movable and immovable electrodes, the movable electrode has an opening, the width of which is close to the value 2Δx (Δx - amplitude of "ПМ" oscillations on the axis of primary oscillations). The edge of at least one of the immoveable electrodes is put above or under the opening in the moveable electrode. In a micromechanical gyroscope with such an electrode structure, where electrodes are placed above the opening, the outputs of voltage sources are connected and a capacitor to voltage converter is employed, which is connected to at least one of the electrodes placed above the opening.;EFFECT: increased accuracy of the micromechanical gyroscope due to suppression of quadrature noises and shorter warm-up time and dimensions of the micromechanical gyroscope, achieved by reducing the surface area occupied by interdigitated-finger electrodes.;7 cl, 9 dwg
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