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SURFACE WAVE EXCITATION PLASMA GENERATOR AND SURFACE WAVE EXCITATION PLASMA PROCESSING SYSTEM
SURFACE WAVE EXCITATION PLASMA GENERATOR AND SURFACE WAVE EXCITATION PLASMA PROCESSING SYSTEM
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机译：面波激发等离子体发生器和面波激发等离子体处理系统
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摘要
is an object of the present invention is to efficiently generate the surface wave excited plasma. Wave excited plasma generator 10 has an annular wave guide (2) and dielectric tube (3). Ring-shaped waveguide (2) is a microwave (M) inlet for introducing a (2a), is introduced to propagate microwave tube (M) is a reflective termination plate (2b) and a slot antenna (2d) is formed at a predetermined distance which has a bottom plate (2c). If the wavelength of the microwave tube (M) by g, each from the position (b) on the base plate (2c) positions (c, d, e) the length of the position (f) through, that is, the annular waveguide (2 Setting the circumferential length ( D1) in the 2 g) and sets the respective position (b, c, d, e, f) at an interval of g / 2. Since the slot antenna (2d) being disposed in two positions of the position (c) and the location (e), 2-slot interval of the antenna (2d) will be equal to the hall wavelength ( g).
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