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AIR CLEANING SYSTEM FOR TESTING EQUIPMENT OF TFT-LCD PANEL ARRAY AND MODULATOR AIR CLEANING MACHINE FOR THE SAME
AIR CLEANING SYSTEM FOR TESTING EQUIPMENT OF TFT-LCD PANEL ARRAY AND MODULATOR AIR CLEANING MACHINE FOR THE SAME
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机译：TFT-LCD面板阵列测试设备的空气净化系统和相同的调制器空气净化机
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摘要
An air cleaning system for a testing equipment of TFT LCD panel array and a modulator air cleaning machine for the same are provided to reduce the defect inspection time by preventing the damage of the modulator. A transport unit(110) transfers the TFT-LCD panel(10) to unitary in the inside of the array-tester equipment(100) in the loading space to the test space part(102). An air curtain part(120) includes the jet line formed longer than into the longitudinal direction which sprays the compressed air to the lower direction while having the outer side jet of the test space part. If the TFT-LCD panel is placed at the test space, a modulator(130) has the light reflection means which is positioned at one side of the test space part and determines existence and/or non existence of fault of each liquid crystal cell. An air cleaning machine sprays the compressed air(122) on the lower surface of the TFT-LCD panel while inserting the bottom a part of modulator and removes the foreign material(140).
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