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NON-PLANAR MOLD HAVING A MICRO-PATTERN AND A MANUFACTURING METHOD THEREOF, CAPABLE OF STEADILY FIXING A SUBSTRATE AND A NON-PLANAR MOLD BODY
NON-PLANAR MOLD HAVING A MICRO-PATTERN AND A MANUFACTURING METHOD THEREOF, CAPABLE OF STEADILY FIXING A SUBSTRATE AND A NON-PLANAR MOLD BODY
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机译：具有微模式的非平面模具及其制造方法，能够牢固地固定基体和非平面模具
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摘要
PURPOSE: A non-planar mold and a manufacturing method thereof are provided to manufacture the micro-pattern on the non-planar mold body in a nano size.;CONSTITUTION: A non-planar mold having a micro-pattern and a manufacturing method thereof include the step of forming a photoresist layer on the planar substrate(S101); the step of exposing the photoresist layer(S102); the step of developing the photoresist layer(S103); the step of etching the substrate in order to form the micro-pattern with nano size on the substrate(S104); the step of removing the remaining photoresist layer(S105); the step of adhering the substrate to the mold body which has a non-planar(S106).;COPYRIGHT KIPO 2010
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