首页> 外国专利> DIAMOND-LIKE CARBON COATING METHOD FOR ENHANCING WEAR RESISTANCE AND INTERFACIAL TOUGHNESS IN AQUEOUS ENVIRONMENT

DIAMOND-LIKE CARBON COATING METHOD FOR ENHANCING WEAR RESISTANCE AND INTERFACIAL TOUGHNESS IN AQUEOUS ENVIRONMENT

机译:增强水环境中耐磨性和界面韧性的类金刚石碳涂层方法

摘要

A thin film deposition technique is provided to reduce the exfoliation abrasive phenomenon in the underwater environment of a thin film by forming a DLC thin film using benzene and hydrogen as a precursor. A thin film deposition technique makes a thin film by a plasma assisted chemical vapor deposition method. Precursor gas is made by mixing hydrogen gas and benzene gas. A mixture ratio of hydrogen gas mixed in the benzene gas is more than 1:0 and less than 1:2. The DLC film is made by the plasma enhanced chemical vapor deposition method by giving the radio frequency power supply to an electrode while supplying the methane gas within a chamber. The pressure within the reaction chamber is 0.1~100 mTorr. The voltage adding on the electrode is 0~2000 eV.
机译:提供了一种薄膜沉积技术,以通过使用苯和氢作为前体形成DLC薄膜来减少薄膜在水下环境中的剥离剥落现象。薄膜沉积技术通过等离子体辅助化学气相沉积法制造薄膜。前体气体是通过将氢气和苯气混合制成的。苯气体中混合的氢气的混合比大于1:0且小于1:2。 DLC膜是通过等离子增强化学气相沉积法制造的,方法是在向室内提供甲烷气体的同时,向电极提供射频电源。反应室内的压力为0.1〜100mTorr。电极上施加的电压为0〜2000 eV。

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