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DIAMOND-LIKE CARBON COATING METHOD FOR ENHANCING WEAR RESISTANCE AND INTERFACIAL TOUGHNESS IN AQUEOUS ENVIRONMENT
DIAMOND-LIKE CARBON COATING METHOD FOR ENHANCING WEAR RESISTANCE AND INTERFACIAL TOUGHNESS IN AQUEOUS ENVIRONMENT
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机译:增强水环境中耐磨性和界面韧性的类金刚石碳涂层方法
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摘要
A thin film deposition technique is provided to reduce the exfoliation abrasive phenomenon in the underwater environment of a thin film by forming a DLC thin film using benzene and hydrogen as a precursor. A thin film deposition technique makes a thin film by a plasma assisted chemical vapor deposition method. Precursor gas is made by mixing hydrogen gas and benzene gas. A mixture ratio of hydrogen gas mixed in the benzene gas is more than 1:0 and less than 1:2. The DLC film is made by the plasma enhanced chemical vapor deposition method by giving the radio frequency power supply to an electrode while supplying the methane gas within a chamber. The pressure within the reaction chamber is 0.1~100 mTorr. The voltage adding on the electrode is 0~2000 eV.
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