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POSITION MEASURING DEVICE AND POSITION MEASURING METHOD, MOBILE BODY DRIVING SYSTEM AND MOBILE BODY DRIVING METHOD, PATTERN FORMING DEVICE AND PATTERN FORMING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
POSITION MEASURING DEVICE AND POSITION MEASURING METHOD, MOBILE BODY DRIVING SYSTEM AND MOBILE BODY DRIVING METHOD, PATTERN FORMING DEVICE AND PATTERN FORMING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
A position measuring device includes linear encoders (50A to 50D) having four movable scales (44A to 44D) which are secured to a wafer stage (WST) and surround a wafer (W); and head units (46A to 46D) which are corresponding to the movable scales and emit a light having a wavelength in the longitudinal direction substantially longer than that in the direction perpendicular to the longitudinal direction. The information on the position of the wafer stage (WST) in an XY plane is calculated on the basis of the results of measured by the encoders. Thereby, the position of a mobile body can be accurately measured without increasing the size.
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