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Electronics industry installation and method for operating electronic industry installation
Electronics industry installation and method for operating electronic industry installation
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机译：电子工业安装和操作电子工业安装的方法
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摘要
The method involves producing semiconductor products i.e. semiconductor wafer, using a production unit (200). A low temperature-air decomposition unit (100) withdraws nitrogen product stream as one product stream (110), pure oxygen stream as another product stream (120) and impure oxygen stream as a third product stream (130). The latter product stream and the third product stream are fed to the production unit. The third product stream exhibits a composition, which differs from a composition of the former product stream and a composition of the latter product stream. An independent claim is also included for an electronic industry installation.
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