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ALUMINUM NITRIDE SUBSTRATE WITH OXIDE LAYER, ALUMINUM NITRIDE SINTERED COMPACT, PROCESSES FOR PRODUCING THE ALUMINUM NITRIDE SUBSTRATE AND THE ALUMINUM NITRIDE SINTERED COMPACT, CIRCUIT BOARD, AND LED MODULE
ALUMINUM NITRIDE SUBSTRATE WITH OXIDE LAYER, ALUMINUM NITRIDE SINTERED COMPACT, PROCESSES FOR PRODUCING THE ALUMINUM NITRIDE SUBSTRATE AND THE ALUMINUM NITRIDE SINTERED COMPACT, CIRCUIT BOARD, AND LED MODULE
Disclosed is an aluminum nitride substrate comprising an aluminum nitride sintered compact and an oxide layer having a high adhesive strength provided on a surface of the aluminum nitride sintered compact. The aluminum nitride substrate comprises an oxide layer (3) and is characterized in that the oxide layer contains aluminum nitride crystal particles (4) and the thickness of a virtual layer formed of only aluminum oxide calculated based on the total content of the aluminum oxide component in the oxide layer is 5 to 100 μm.
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