首页>
外国专利>
TWO-DIRECTION SHAPE-MEMORY ALLOY THIN FILM ACTUATOR AND METHOD FOR MANUFACTURING SHAPE-MEMORY ALLOY THIN FILM USED IN THE ACTUATOR
TWO-DIRECTION SHAPE-MEMORY ALLOY THIN FILM ACTUATOR AND METHOD FOR MANUFACTURING SHAPE-MEMORY ALLOY THIN FILM USED IN THE ACTUATOR
展开▼
机译:二维形状记忆合金薄膜致动器和制造用于致动器的形状记忆合金薄膜的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A two-direction shape-memory alloy thin film actuator is formed by a monocrystal shape-memory alloy thin film which is formed substantially into a single layer while having a residual stress upon film formation and operates at a room temperature or above without requiring application of a particular bias force.
展开▼