首页> 外国专利> TWO-DIRECTION SHAPE-MEMORY ALLOY THIN FILM ACTUATOR AND METHOD FOR MANUFACTURING SHAPE-MEMORY ALLOY THIN FILM USED IN THE ACTUATOR

TWO-DIRECTION SHAPE-MEMORY ALLOY THIN FILM ACTUATOR AND METHOD FOR MANUFACTURING SHAPE-MEMORY ALLOY THIN FILM USED IN THE ACTUATOR

机译:二维形状记忆合金薄膜致动器和制造用于致动器的形状记忆合金薄膜的方法

摘要

A two-direction shape-memory alloy thin film actuator is formed by a monocrystal shape-memory alloy thin film which is formed substantially into a single layer while having a residual stress upon film formation and operates at a room temperature or above without requiring application of a particular bias force.
机译:双向形状记忆合金薄膜致动器由单晶形状记忆合金薄膜形成,该单晶形状记忆合金薄膜基本上形成为单层,同时在形成膜时具有残余应力,并且在室温或更高温度下操作而无需施加特定的偏压力。

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