首页> 外国专利> METHOD OF PATTERNING AN ORGANIC THIN FILM, AN ORGANIC THIN FILM TRANSISTOR, A METHOD OF MANUFACTURING AN ORGANIC THIN FILM TRANSISTOR, AND AN ORGANIC ELECTROLUMINESCENE DISPLAY DEVICE HAVING THE ORGANIC THIN FILM TRANSISTOR

METHOD OF PATTERNING AN ORGANIC THIN FILM, AN ORGANIC THIN FILM TRANSISTOR, A METHOD OF MANUFACTURING AN ORGANIC THIN FILM TRANSISTOR, AND AN ORGANIC ELECTROLUMINESCENE DISPLAY DEVICE HAVING THE ORGANIC THIN FILM TRANSISTOR

机译:具有有机薄膜晶体管的有机薄膜的制造方法,有机薄膜晶体管的制造方法以及具有该有机薄膜晶体管的有机光电显示装置

摘要

Provided is a method of patterning an organic thin film which can prevent surface damage of an organic semiconductor layer. Also, an organic thin film transistor that can reduce an off-current and can prevent surface damage of the organic semiconductor layer and a method of manufacturing the organic thin film transistor, and an organic electroluminescence display device having the organic thin film transistor are provided. The method of patterning the organic thin film includes forming the organic thin film on a substrate, selectively printing a mask material on a portion of the organic thin film, dry etching an exposed portion of the organic thin film using the mask material, and removing the mask material.
机译:提供一种图案化有机薄膜的方法,其可以防止有机半导体层的表面损坏。另外,提供了一种可以减少截止电流并且可以防止有机半导体层的表面损坏的有机薄膜晶体管,一种有机薄膜晶体管的制造方法以及具有该有机薄膜晶体管的有机电致发光显示装置。图案化有机薄膜的方法包括:在基板上形成有机薄膜;在有机薄膜的一部分上选择性地印刷掩模材料;使用掩模材料对有机薄膜的暴露部分进行干蚀刻;以及去除掩模。面膜材料。

著录项

  • 公开/公告号US2009272969A1

    专利类型

  • 公开/公告日2009-11-05

    原文格式PDF

  • 申请/专利权人 MIN-CHUL SUH;JAE-BON KOO;

    申请/专利号US20090504312

  • 发明设计人 MIN-CHUL SUH;JAE-BON KOO;

    申请日2009-07-16

  • 分类号H01L51/30;H01L51/40;

  • 国家 US

  • 入库时间 2022-08-21 19:34:06

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