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Method of predicting reliability of semiconductor device, reliability prediction system using the same and storage medium storing program causing computer to execute the same
Method of predicting reliability of semiconductor device, reliability prediction system using the same and storage medium storing program causing computer to execute the same
An initial reliability of a semiconductor device is predicted before the design layout of a semiconductor product. A method of predicting the reliability of a semiconductor device according to the present invention: calculates the defect density of a plurality of wiring patterns on a wafer; extracts the critical area of a series of library elements formed of wiring patterns based on the defect density to determine the critical area value of each library element; determines a failure probability by wiring pattern from the result of a reliability test of the wiring pattern to form a correlation model from an expected value in which a defect is generated and which is obtained from the defect density and the failure probability of each wiring pattern; calculates the failure probability of each library element from the critical area value and the function of the correlation model; designs a layout of a semiconductor product with two library elements or more out of a series of the library elements combined together and calculates the reliability of the designed semiconductor device in consideration of the failure probability of the library elements combined together.
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