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Analysis methods and analyzer of trace impurities in the gas
Analysis methods and analyzer of trace impurities in the gas
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机译:气体中微量杂质的分析方法和分析仪
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摘要
PROBLEM TO BE SOLVED: To provide an analysis method and an analysis apparatus of a very small quantity of impurity that can be analyzed at a higher precision.;SOLUTION: In the analysis method of the very small quantity of impurity in a gas using a mass spectroscope for separating the very small quantity of impurity in a sample gas by a separation column 2 of a gas chromatograph, ionizing the very small quantity of impurity at an ion source section 19, and separating mass, pressure in the ion source section 19 from the separation column 2 is kept higher than an atmospheric pressure for analysis.;COPYRIGHT: (C)2004,JPO
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