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OPTICAL FIBER TYPE SURFACE PLASMON HUMIDITY SENSOR, SURFACE PLASMON HUMIDITY SENSOR, OPTICAL FIBER TYPE HUMIDITY SENSOR, AND HUMIDITY MEASURING APPARATUS
OPTICAL FIBER TYPE SURFACE PLASMON HUMIDITY SENSOR, SURFACE PLASMON HUMIDITY SENSOR, OPTICAL FIBER TYPE HUMIDITY SENSOR, AND HUMIDITY MEASURING APPARATUS
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机译：光纤型表面等离子湿度传感器，表面等离子湿度传感器，光纤型湿度传感器和湿度测量装置
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摘要
PROBLEM TO BE SOLVED: To provide a surface plasmon humidity sensor capable of improving the sensitivity to humidity.;SOLUTION: In the middle of optical fibers (20a, 20b), a sensor part SP is placed having a metal membrane that generates surface plasmon according to reflection of light in a light-transmitting member for making a part of transmitting light interact with an outside field and a light-transmitting member of the outer peripheral surface. The metal membrane 50, which generates surface plasmon according to reflection of light in the light-transmitting member of the outer peripheral surface, is placed on the outer peripheral surface of the sensor part. A membrane 60, whose refractive index is varied depending on the moisture in the atmosphere, is placed on the outer peripheral surface of the metal membrane 50. A light source is placed to direct a sensor light to an incident end of the optical fiber. A light-receiving part is places to detect the sensor light emitted from an emitting end of the optical fiber via the light-transmitting member.;COPYRIGHT: (C)2009,JPO&INPIT
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