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Step bunch single crystal sapphire inclined substrate and a method of manufacturing the same
Step bunch single crystal sapphire inclined substrate and a method of manufacturing the same
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机译:阶梯束单晶蓝宝石倾斜衬底及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a step bunch single crystal sapphire inclined substrate suitable for a device including quantum structure like a SAW (Surface Acoustic Wave) filter.;SOLUTION: The single crystal sapphire inclined substrate inclining at a specified angle with a specified crystal axis of single crystal sapphire oriented toward a specified orientation is the step bunch single crystal sapphire inclined substrate 1 having a step bunch formed by bunching steps 2 by controlling heat treatment duration and a heating temperature in accordance with the inclined angle θ of the principal plane of the single crystal sapphire inclined substrate.;COPYRIGHT: (C)2004,JPO&NCIPI
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