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Step bunch single crystal sapphire inclined substrate and a method of manufacturing the same

机译:阶梯束单晶蓝宝石倾斜衬底及其制造方法

摘要

PROBLEM TO BE SOLVED: To provide a step bunch single crystal sapphire inclined substrate suitable for a device including quantum structure like a SAW (Surface Acoustic Wave) filter.;SOLUTION: The single crystal sapphire inclined substrate inclining at a specified angle with a specified crystal axis of single crystal sapphire oriented toward a specified orientation is the step bunch single crystal sapphire inclined substrate 1 having a step bunch formed by bunching steps 2 by controlling heat treatment duration and a heating temperature in accordance with the inclined angle θ of the principal plane of the single crystal sapphire inclined substrate.;COPYRIGHT: (C)2004,JPO&NCIPI
机译:解决的问题:提供一种阶梯束单晶蓝宝石倾斜衬底,适用于包括量子结构的器件,例如SAW(表面声波)滤光片。;解决方案:单晶蓝宝石倾斜衬底与指定晶体成指定角度倾斜。朝向规定的取向的单晶蓝宝石的轴是具有通过根据倾斜角θ控制热处理时间和加热温度而通过将工序2成束而形成的台阶束的台阶束单晶蓝宝石倾斜基板1。单晶蓝宝石斜衬底的主平面的角度。;版权所有:(C)2004,日本特许厅&日本金属学会

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