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METHOD FOR FORMING IN-PLANE TYPE JOSEFSON JUNCTION ON HIGH-TEMPERATURE SUPERCONDUCTIVITY SINGLE CRYSTAL
METHOD FOR FORMING IN-PLANE TYPE JOSEFSON JUNCTION ON HIGH-TEMPERATURE SUPERCONDUCTIVITY SINGLE CRYSTAL
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机译：高温超导单晶上平面内约瑟夫逊结的形成方法
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PROBLEM TO BE SOLVED: To eliminate the problem of the non-uniformity of the characteristic of a Josefson junction constituting an element, in the creating method of a HTS-SQUID two-dimensional array.;SOLUTION: The method for forming an in-plane type Josefson junction includes a step (1) of so cleaving a Bi-based high-temperature superconductivity single crystal as to taking out its clean surface, a step (2) of converting by a reduction the whole of the single crystal into an insulator, an ordinary conductor or a weak superconductor, a step (3) of so reactivating a superconductivity only in the surface of the insulator, the ordinary conductor or the weak superconductor by its oxidation as to convert it into a superconductor layer, a step (4) of so shaving at a right angle by a photographic working the 40-60% portion of the whole area of an ab-plane of a superconductivity layer 1A created in the step (3) as to leave the 20-40 nm portion of the superconductivity layer 1A in a c-axis direction and as to form an exposure surface, a step (5) of so converting by an isotropic reduction only the exposure surface of the superconductivity layer created in the step (4) into an insulator as to form an insulator layer, and a step (6) of converting by a directional oxidation only the insulator layer created in the step (5) into a superconductor layer.;COPYRIGHT: (C)2009,JPO&INPIT
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