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首页> 外国专利> THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYSIS METHOD USING SCANNING PROBE MICROSCOPE, THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYZER AND THREE-DIMENSIONAL MEMBRANE STRUCTURE MEASURING METHOD OF SCANNING PROBE MICROSCOPE

THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYSIS METHOD USING SCANNING PROBE MICROSCOPE, THREE-DIMENSIONAL MEMBRANE STRUCTURE ANALYZER AND THREE-DIMENSIONAL MEMBRANE STRUCTURE MEASURING METHOD OF SCANNING PROBE MICROSCOPE

机译：扫描探针显微镜的三维膜结构分析方法，三维膜结构分析仪和扫描探针显微镜的三维膜结构测量方法

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PROBLEM TO BE SOLVED: To provide a three-dimensional membrane structure measuring method of a scanning probe microscope capable of measuring the surface shapes of respective layers at every manufacturing process in a manufacturing process of a semiconductor device having a multilayered structure to synthesize the measurement results and capable of analyzing and evaluating those measuring results using the data of a multilayer.;SOLUTION: The three-dimensional membrane structure analysis method using the scanning probe microscope has a measuring step (S12 and S14) for measuring the surface shapes of a plurality of arbitrary layers in a structure formed of a plurality of layers at each time when each of a plurality of the arbitrary layers is formed (steps S11 and S13) by an atomic force microscope or the like and a measuring data synthesizing step (step S16) for aligning the measuring data related to the surface shape of a certain layer and the measuring data related to the surface shape of the second layer of another layer in relation to the same two-dimensional region on a layer surface and three-dimensionally arranging the measuring data on the basis of an interlayer distance to form a three-dimensional membrane structure.;COPYRIGHT: (C)2010,JPO&INPIT
机译：解决的问题：提供一种扫描探针显微镜的三维膜结构测量方法，该方法能够在具有多层结构的半导体器件的制造过程中的每个制造过程中测量各个层的表面形状，以合成测量结果SOLUTION：使用扫描探针显微镜的三维膜结构分析方法具有测量步骤（S12和S14），用于测量多个表面的形状。通过原子力显微镜等每次形成多个任意层中的每一个时（步骤S11和S13），并通过测量数据合成步骤（步骤S16），每次由多层形成的结构中的任意层。将与某层的表面形状有关的测量数据与与该表面形状有关的测量数据对齐另一层的第二层相对于层表面上相同的二维区域的关系，并基于层间距离三维布置测量数据以形成三维膜结构。;版权所有：（C） 2010，日本特许厅

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