首页>
外国专利>
Structures i.e. honed structures, evaluation method, involves separating target characteristics and error characteristics for separation of target and error structures, and fragmenting original image into corrugated-and contact area image
Structures i.e. honed structures, evaluation method, involves separating target characteristics and error characteristics for separation of target and error structures, and fragmenting original image into corrugated-and contact area image
The method involves separating target characteristics and error characteristics for separation of target and error structures. An original image is fragmented into a corrugated-and contact area image and a remaining image during the structures separation. The original image is obtained with the help of white light interferometry from optical three dimensional data. Measured three dimensional data or three dimensional image is processed, and original image relevant parameters are extracted.
展开▼
