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Sensor for measuring concentration of components in a fluid, comprises a semiconductor chip with a deformable body, which is a part of mechanoelectric converter present in the chip, and a polymer network layer or body
Sensor for measuring concentration of components in a fluid, comprises a semiconductor chip with a deformable body, which is a part of mechanoelectric converter present in the chip, and a polymer network layer or body
The sensor for measuring concentration of components in a fluid, comprises a semiconductor chip with a deformable body (3), which is a part of mechanoelectric converter present in the chip, a layer or a body out of a polymer network (5) that is capable of swelling, with volume phase transition behavior in a determined concentration of one or more components in the fluid, and a carrier (6) that carries the semiconductor chip and forms a cavity with the chip. The polymer network forms itself in the cavity, works on the deformable body and/or an inlet and an outlet for the fluid. The sensor for measuring concentration of components in a fluid, comprises a semiconductor chip with a deformable body (3), which is a part of mechanoelectric converter present in the chip, a layer or a body out of a polymer network (5) that is capable of swelling, with volume phase transition behavior in a determined concentration of one or more components in the fluid, and a carrier (6) that carries the semiconductor chip and forms a cavity with the chip. The polymer network forms itself in the cavity, works on the deformable body and/or an inlet and an outlet for the fluid and has a temperature dependent volume-phase transition. A switchable heating element (9) is arranged in the vicinity of the polymer network. During switching on the heating element, the polymer network shrinks under rinsing/pressing of the fluid and during switching off the heating element, the shrinkage of the polymer network is stopped. The sensor consists of a control for the switchable heating element. The deformable body is a bending plate or membrane, which is locally thinned in the semiconductor chip, and consists of piezoresistive resistor (4) as mechanoelectric converter. The deformable body forms the movable electrode of a condenser arrangement that forms a part of the mechanoelectric converter. The polymer network is subjected as thin film in the cavity of the deformable body and is brought as body in the cavity between the deformable body and the carrier. The heating element is an integrated resistor in the chip, is integrated in the deformable body, is subjected in the cavity and is arranged in or on the carrier. The semiconductor chip consists of a temperature sensor. An independent claim is included for a procedure for measuring concentration of components in a fluid.
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