首页> 外国专利> METHOD FOR CONTROLLING A MORPHOLOGY OF A SURFACE OF A POLYMER USING ION-BEAM AND A POLYMER WITH A RIPPLE PATTERN ON ITS SURFACE FABRICATED THEREBY, AND ITS APPLICATIONS

METHOD FOR CONTROLLING A MORPHOLOGY OF A SURFACE OF A POLYMER USING ION-BEAM AND A POLYMER WITH A RIPPLE PATTERN ON ITS SURFACE FABRICATED THEREBY, AND ITS APPLICATIONS

机译:离子束和具有波纹图案的聚合物在其制成的表面上控制聚合物表面形态的方法及其应用

摘要

A method for controlling morphology of a surface of a polymer using an ion beam and a polymer with a ripple pattern on a surface fabricated thereby, and applications thereof are provided to form a nano-size pattern of a particular shape in a desired region by changing an irradiation time and an incident angle. A focused ion beam(4) is irradiated obliquely in an incident angle(2) of a constant angle on an irradiation region(5) of an upper surface of a polymer substrate(3) in order to form a ripple pattern. A hierarchical structure having two or more different periods is formed in the ripple pattern by adjusting a beam irradiation time. The ripple pattern is oriented in a particular direction. The width and height of the ripple pattern are controlled by adjusting at least one of the incident angle and an irradiation time of the ion beam and intensity of an acceleration voltage.
机译:一种使用离子束控制聚合物表面形态的方法以及由此制造的在表面上具有波纹图案的聚合物,其应用提供了通过改变所需形状在所需区域中形成特定尺寸的纳米尺寸图案的方法照射时间和入射角。将聚焦的离子束(4)以恒定角度的入射角(2)倾斜地照射在聚合物基板(3)的上表面的照射区域(5)上,以形成波纹图案。通过调节光束照射时间,在波纹图案中形成具有两个或更多个不同周期的分级结构。波纹图案沿特定方向定向。通过调节离子束的入射角和照射时间以及加速电压的强度中的至少之一来控制波纹图案的宽度和高度。

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