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PREPARATION METHOD OF PZT BASED THICK FILM DEPOSITED USING THE POWDER WITH EXCESS PBO
PREPARATION METHOD OF PZT BASED THICK FILM DEPOSITED USING THE POWDER WITH EXCESS PBO
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机译：用PBO过多的粉末沉积PZT基厚膜的制备方法
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摘要
A method for forming a PZT based thick film is provided to prevent complex ceramics powder from being peeled off from a substrate by improving the stabilization between the substrate and the complex ceramics powder. An excess amount of PbO powder, ZrO2 powder, TiO2 powder, ZnO powder and Nb2O5 powder are mixed through ball milling, and then are calcined at a temperature of 750 to 1000 degrees centigrade to prepare complex ceramics powder. The complex ceramics power is deposited on a substrate through aerosol deposition method at a room temperature, and then the deposited ceramics film is processed by the heat treatment. A mean grain size of the PbO power is within a range of 0.5 to 5 micrometers.
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