首页>
外国专利>
SUBSTRATE STORAGE FACILITY, SUBSTRATE PROCESSING FACILITY AND METHOD OF OPERATING SUBSTRATE STORAGE FACILITY
SUBSTRATE STORAGE FACILITY, SUBSTRATE PROCESSING FACILITY AND METHOD OF OPERATING SUBSTRATE STORAGE FACILITY
展开▼
机译：基质存储设施，基质处理设施和操作基质存储设施的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Equipment for containing substrates, a method for operating the same, and equipment for processing substrates are provided to maintain the cleanness of substrates and to reduce the cost of equipment. Equipment for containing substrates comprises a shelf(5), a container incoming/outgoing part(9), a container carrier(8), and a control unit. The shelf comprises a plurality of receiving parts(4) to accept containers(2). The container carrier conveys containers to the incoming/outgoing part and the receiving parts. The control unit controls the operation of the container carrier. Each container has the first opening, the second opening, and a fan filter unit(64). The first opening is formed as an entrance for the incoming and outgoing of substrates. The fan filter unit, which circulates air from the second opening toward the first opening, is installed at the region of second opening.
展开▼
