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SCRIBE METHOD OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS AND SCRIBE HEAD APPARATUS OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS
SCRIBE METHOD OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS AND SCRIBE HEAD APPARATUS OF CUTTING OBJECT BY SUSTENANCE CONTACTLESS FLATNESS
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机译：用维持接触平整度切割物体的方格方法和利用维持连续平整度切割物体的方头装置
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摘要
A scribe head apparatus for an object to be cut off which sustains contactless flatness by means of gas floating and a method of scribing using the apparatus are provided to minimize the speed difference of answer under feedback control system for improving process efficiency. A scribe head apparatus which sustains contactless flatness, equipped on both the upper and the lower sides of the object to be cut off for sequential cutting of the object while moving along X axis and Y axis on both sides comprises: the 1, 2 head driving modules(1a,1b) which are equipped on both the upper and the lower sides of the object to be cut off and to be driven forward the object coming in contact with the object for cutting process; and the 1, 2 modules for sustaining contactless flatness(2a,2b) which are equipped in both sides of the 1, 2 head driving modules(1a,1b) for sustaining the flatness in the cut section of the object to be cut off by means of gas floating. The 1, 2 head driving modules(1a,1b) consist of the 1, 2 scribe heads(120a, 120b) which are supported at both ends for rotation; and the 1, 2 head driving parts(130a,130b) which drive the 1, 2 scribe head(120a, 120b) for or against the object to be cut off. The 1, 2 modules for sustaining contactless flatness(2a,2b) consist of the 1, 2 plates for sustaining flatness(140a,140b) having numerous nozzles for spraying gas from the upper and lower parts toward the center in the modules; and the 1, 2 gas suppliers(150a,150b) for supplying pressured gas inside the 1, 2 plates for sustaining flatness(140a,140b). The method of scribing an object using the apparatus comprises the steps of: loading an object to be cut off, of which flatness is not sustained; spraying gas along the section to be cut off in the object; floating the object to be cut off by means of gas for sustaining flatness; and sequentially scribing the object while moving along X axis and Y axis on both sides of the object while sustaining the flatness at every cut section of the object to be cut off.
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