首页> 外国专利> AN OPTICAL MEASUREMENT SYSTEM WITH SIMULTANEOUS MULTIPLE WAVELENGTHS, MULTIPLE ANGLES OF INCIDENCE AND ANGLES OF AZIMUTH

AN OPTICAL MEASUREMENT SYSTEM WITH SIMULTANEOUS MULTIPLE WAVELENGTHS, MULTIPLE ANGLES OF INCIDENCE AND ANGLES OF AZIMUTH

机译:具有多个同时入射角,多个入射角和多个方位角的光学测量系统

摘要

The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. It comprises a light source for providing light rays; a half-parabolic-shaped reflector having an inner reflecting surface, where the reflector having a focal point and an axis of summary, and a device-under-test is disposed thereabout the focal point. The light rays coming into the reflector that is in-parallel with the axis of summary would be directed to the focal point and reflect off said device-under-test and generate information indicative of said device-under-test, and then the reflected light rays exit said reflector. A detector array receives the exited light rays and the light rays can be analyzed to determine the characteristics of the device-under-test.
机译:本发明公开了一种光学测量和/或检查装置,其在一种应用中可以用于检查半导体装置。它包括提供光线的光源。具有内部反射表面的半抛物线形反射器,其中具有焦点和总轴线的被反射器以及被测设备被布置在该焦点附近。入射到与汇总轴平行的反射器中的光线将被引导到焦点并从所述被测设备反射并生成指示所述被测设备的信息,然后是反射光光线射出所述反射器。检测器阵列接收射出的光线,并且可以对光线进行分析以确定被测设备的特性。

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