An electrostatic actuator includes a stator having an electrode substrate, a movable unit having a movable element and an electrode arranged opposite to the electrode substrate, a plurality of first operation modules each of which issues an operation command for realizing a first operation, a plurality of second operation modules each of which issues an operation command for realizing a second operation, a module selector which selectively enables one first operation module of the first operation modules and selectively enables one second operation module of the second operation modules, an actuator drive module which generates a waveform signal on the basis of the operation command from the enabled first operation module and the operation command from the enabled second operation module and a switching circuit which converts the waveform signal into a voltage to apply the voltage to the electrode substrate.
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