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Independent, Self-Contained, Risk Isolated, Sectional CIM Design For Extremely Large Scale Factory Operation
Independent, Self-Contained, Risk Isolated, Sectional CIM Design For Extremely Large Scale Factory Operation
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机译:独立,自包含,风险隔离,分段CIM设计,可用于超大规模工厂运营
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摘要
A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.
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