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Independent, Self-Contained, Risk Isolated, Sectional CIM Design For Extremely Large Scale Factory Operation

机译:独立,自包含,风险隔离,分段CIM设计,可用于超大规模工厂运营

摘要

A semiconductor manufacturing system includes a centralized computer integrated manufacturing (CIM) system; a plurality of sectional CIM systems respectively associated with a plurality of manufacturing facilities and coupled with the centralized CIM system; and a centralized basic record module, coupled and coordinated with the centralized CIM system, and designed for defining a unified process flow associated to a mobile object.
机译:半导体制造系统包括中央计算机集成制造(CIM)系统;分别与多个制造设施相关联并与集中式CIM系统耦合的多个分段CIM系统;集中式基本记录模块,与集中式CIM系统耦合和协调,设计用于定义与移动对象相关的统一流程。

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