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APPARATUS FOR OBSERVING AN ASSEMBLED STATE OF COMPONENTS AND METHOD OF OBSERVING AN ASSEMBLED STATE OF COMPONENTS USING SUCH APPARATUS
APPARATUS FOR OBSERVING AN ASSEMBLED STATE OF COMPONENTS AND METHOD OF OBSERVING AN ASSEMBLED STATE OF COMPONENTS USING SUCH APPARATUS
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机译：用于观察组件的组装状态的设备以及使用这种设备来观察组件的组装状态的方法
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摘要
When bonding a workpiece to a substrate, processed parts of the substrate and the workpiece are observed and behavior such as the production of voids and the flowing of resin is observed. An apparatus for observing an assembled state of components includes: a stage on which a substrate is set; a head mechanism that bonds, by applying heat and pressure, an observation workpiece made of a transparent material to the substrate via resin supplied between the substrate and the observation workpiece; a light source that irradiates an observed part of the substrate and the observation workpiece mounted on the stage with light; and a camera that takes, from the observation workpiece side, an image of the observed part when the observation workpiece is bonded to the substrate set on the stage.
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