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The material which formed the fluorocarbon resin which features that the fluorocarbon resin which to fluorine is converted possessed the fluoridation passivity film which
The material which formed the fluorocarbon resin which features that the fluorocarbon resin which to fluorine is converted possessed the fluoridation passivity film which
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机译：形成具有将氟转化为氟的氟树脂的特征的氟碳树脂的材料具有氟钝化膜，该氟钝化膜具有以下特征。
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摘要
PROBLEM TO BE SOLVED: To provide a material capable of being inexpensively and easily produced within a short time, capable of forming a thick fluorocarbon film only on an objective surface, having sufficient corrosion resistance against corrosive gas or semiconductor process gas such as special gas or the like, especially, against plasma and a chemical soln. and having fluoroplastic formed on the surface of a fluorinated passivated film transmitting ultrasonic waves. ;SOLUTION: A fluorinated passivated film is provided on the surface of a base metal material and fluoroplastic is formed on the surface of the fluorinated passivated film by electrostatic powder coating. Or, the fluorinated passivated film is provided on the surface of the base metal material and fluoroplastic is formed on the surface of the fluorinated passivated film by electrostatic powder coating to be irradiated with plasma.;COPYRIGHT: (C)1999,JPO
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