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TUNING FORK TYPE CRYSTAL VIBRATION ELEMENT AND MANUFACTURING METHOD THEREFOR
TUNING FORK TYPE CRYSTAL VIBRATION ELEMENT AND MANUFACTURING METHOD THEREFOR
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机译：音叉式晶体振动元件的调谐及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a tuning fork type crystal vibration element which can be readily adjusted to a proper frequency, even if frequency dispersion is generated during wafer processing, and to provide a manufacturing method therefor.;SOLUTION: The tuning fork type crystal vibration element has a plurality of groove portions 3 or a plurality of recessed portions 5, formed on the arm tip portions and also has metal coatings 4 and 6 for frequency adjustment formed in the groove portions 3 or recessed portions 5. In particular, the tuning fork type crystal vibration element has, the frequency characteristics prior to the metal coatings 4 and 6 are formed, all being set higher than the desired frequency and also having the frequency characteristics, all being set lower than the desired frequency by forming the metal coatings 4 and 6, and being adjusted to the desired frequency by grinding the metal coatings 4 and 6. The manufacturing method therefor is also provided.;COPYRIGHT: (C)2008,JPO&INPIT
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