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The method of revising the systematic error of the laser processing system

机译:修正激光加工系统系统误差的方法

摘要

A method for detecting particulate contamination under a workpiece fixtured by a calibrated material handling system includes performing 3D measurements of a workpiece at multiple of positions to construct a 3D map of the workpiece, calibrating the 3D map by comparing a pre-computed calibration map to the 3D measurements, and detecting particulate contamination by processing the calibrated map.
机译:一种用于检测由校准材料处理系统固定的工件下的微粒污染的方法,该方法包括在多个位置执行工件的3D测量,以构建工件的3D图,通过将预先计算的校准图与工件之间的比较来校准3D图。 3D测量,并通过处理校准图来检测微粒污染。

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