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The method of revising the systematic error of the laser processing system
The method of revising the systematic error of the laser processing system
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机译:修正激光加工系统系统误差的方法
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摘要
A method for detecting particulate contamination under a workpiece fixtured by a calibrated material handling system includes performing 3D measurements of a workpiece at multiple of positions to construct a 3D map of the workpiece, calibrating the 3D map by comparing a pre-computed calibration map to the 3D measurements, and detecting particulate contamination by processing the calibrated map.
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