首页> 外国专利> MANUFACTURING METHOD OF FIELD EMISSION ELECTRON GUN, FIELD EMISSION ELECTRON GUN BY THE SAME, REGENERATION METHOD OF CHARGED PARTICLE BEAM DEVICE AND FIELD EMISSION ELECTRON GUN, CHARGED PARTICLE BEAM DEVICE AND FIELD EMISSION ELECTRON GUN BY THE SAME, AND MULTIPLY-DIVIDED EMITTER ELECTRODE

MANUFACTURING METHOD OF FIELD EMISSION ELECTRON GUN, FIELD EMISSION ELECTRON GUN BY THE SAME, REGENERATION METHOD OF CHARGED PARTICLE BEAM DEVICE AND FIELD EMISSION ELECTRON GUN, CHARGED PARTICLE BEAM DEVICE AND FIELD EMISSION ELECTRON GUN BY THE SAME, AND MULTIPLY-DIVIDED EMITTER ELECTRODE

机译：场致发射电子枪的制造方法，场致发射电子枪的相同制造，带电粒子束设备与场致发射电子枪的再生方法，带电粒子束设备和场致发射电子枪由同一个和多个分倍数构成

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PPROBLEM TO BE SOLVED: To provide a manufacturing method of a field emission electron gun capable of forming extremely-thin needle-like parts at a tip of an emitter electrode by etching a tip surface of the emitter electrode. PSOLUTION: In this manufacturing method of a field emission electron gun provided with multiply divided emitter electrodes for emitting electron beams, by removing and processing a tip part 28 of the emitter electrode 21 by irradiating the tip part 28 with a focused ion beam I, a plurality of needle-like parts 30 independent of one another and extending in the emitting direction of the electron beams are formed at the tip part 28. PCOPYRIGHT: (C)2008,JPO&INPIT

机译：<要解决的问题：提供一种场发射电子枪的制造方法，该方法能够通过蚀刻发射电极的尖端表面在发射电极的尖端形成极细的针状部分。

解决方案：在该场发射电子枪的制造方法中，该发射电子枪具有用于发射电子束的多个分开的发射电极，通过对发射电极21的尖端部分28进行聚焦离子束辐照来对其进行去除和处理。如图I所示，在尖端部分28上形成有多个彼此独立并且在电子束的发射方向上延伸的针状部分30。

版权：（C）2008，JPO＆INPIT 展开▼

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公开/公告号JP2008204868A

专利类型
公开/公告日2008-09-04

原文格式PDF
申请/专利权人 NANO GEOMETRY KENKYUSHO:KK;SII NANOTECHNOLOGY INC;TOPCON CORP;
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申请/专利号JP20070041324
发明设计人 YAMAMOTO MASAHIRO;MINAFUJI TAKASHI;ADACHI TATSUYA;INOUE MASAHIRO;
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申请日2007-02-21
分类号H01J9/02;H01J9/50;H01J1/304;H01J37/073;
国家 JP
入库时间 2022-08-21 20:23:10

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