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ASTIGMATISM MEASURING METHOD FOR ELECTROMAGNETIC LENS, ASTIGMATISM MEASURING APPARATUS, ASTIGMATISM CORRECTING METHOD, AND ELECTRON BEAM APPARATUS
ASTIGMATISM MEASURING METHOD FOR ELECTROMAGNETIC LENS, ASTIGMATISM MEASURING APPARATUS, ASTIGMATISM CORRECTING METHOD, AND ELECTRON BEAM APPARATUS
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机译：电磁透镜的防散影测量方法，防散影测量装置，防散影校正方法和电子束装置
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摘要
PROBLEM TO BE SOLVED: To provide an astigmatism measuring method for an electromagnetic lens, an astigmatism measuring apparatus, an astigmatism correcting method, and an electron beam apparatus, capable of measuring an astigmatism of an electromagnetic lens quantitatively and with a high degree of accuracy.;SOLUTION: An imaging part obtains Ronchigram, as an image data, occurring by entering an electron beam into a single-crystal specimen such as SrTiO3, followed by determining a center position of Rouchigram, and then subjecting Ronchigram to Fourie transform two times to perform calibration of a scale of the image. Next, subjecting Ronchigram to the Fourie transform one time causing a one time Fourie transform image to be obtained, followed by detecting a deviation amount of the luminescent spot from the crystal orientation to calculate an astigmatism coefficient. The calculated result provides control of a deflecting coil for correcting the astigmatism to correct the astigmatism of the electromagnetic lens.;COPYRIGHT: (C)2008,JPO&INPIT
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