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PROCESS FOR MANUFACTURING ELECTROSTATIC ACTUATOR, PROCESS FOR MANUFACTURING LIQUID DROP EJECTION HEAD, ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTION HEAD AND LIQUID DROP EJECTOR
PROCESS FOR MANUFACTURING ELECTROSTATIC ACTUATOR, PROCESS FOR MANUFACTURING LIQUID DROP EJECTION HEAD, ELECTROSTATIC ACTUATOR, LIQUID DROP EJECTION HEAD AND LIQUID DROP EJECTOR
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机译：静电执行器的制造过程，液滴喷射头的制造过程，静电执行器，液滴喷射头和液滴喷射器的制造过程
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摘要
PROBLEM TO BE SOLVED: To form ITO wiring on a glass substrate thicker than an insulating film on the surface of an opposing silicon substrate, and to perform equipotential joint of the ITO wiring and the silicon substrate precisely.;SOLUTION: The process for manufacturing an electrostatic actuator comprises the step of forming an SiO2 layer 41 on the inside of a silicon substrate 1, forming an insulating film 11 on the surface of the silicon substrate where the SiO2 layer 41 is formed, and forming a silicon substrate equipotential contact recess 24A by etching a surface portion of the silicon substrate 1 corresponding to a glass substrate equipotential contact protrusion 24 on the insulating film side until the SiO2 layer 41 appears, the step of exposing the silicon substrate 1 by etching a portion of the bottom of the equipotential contact recess 24A, and the step of sticking the silicon substrate 1 and a glass substrate 2, sticking the equipotential contact recess 24A and the equipotential contact protrusion 24, and anode joining the silicon substrate 1 exposed portion of the equipotential contact recess 24A and the equipotential contact protrusion 24 under an electrically conductive clearance state.;COPYRIGHT: (C)2008,JPO&INPIT
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