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Multilayer optical waveguide structure fabricating method, involves overlaying blocks including substrates through waveguide layer, and heating blocks to bond them by waveguide layer that serves as bonding layer for forming structure
Multilayer optical waveguide structure fabricating method, involves overlaying blocks including substrates through waveguide layer, and heating blocks to bond them by waveguide layer that serves as bonding layer for forming structure
The method involves arranging an optical waveguide layer (2) between substrates (1) e.g. inorganic substrates, having central and cladding regions (2a, 2b) e.g. ultra-violet unexposed and exposed regions, respectively. The layer is formed from polysilane compound containing linear or branched polysilane and silicone. Blocks (3) including the substrates are overlaid through the waveguide layer that is located at a surface of one of the blocks. The blocks are heated to bond them by the waveguide layer that serves as a bonding layer for forming a multilayer optical waveguide structure. An independent claim is also included for a multilayer optical waveguide structure fabricated with the help of the method.
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