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method for fast solve a halbleiterscheibe by an electrostatic scheibenhalter by hysteresis loop
method for fast solve a halbleiterscheibe by an electrostatic scheibenhalter by hysteresis loop
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机译:滞回环的静电场效应快速求解卤虫的方法
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摘要
Method for rapidly dechucking a wafer (114) from a chuck (106) by applying a voltage between the wafer and the electrode that performs a hysteretic discharge cycle such that residual charge is removed. The voltage is a decaying oscillating waveform that provides a decaying electric field at the wafer to chuck surface interface. The form of this field at this interface is very important to achieving rapid dechucking of less than 200 mS. Independent claims are also included for the following: (a) ion implant system; (b) apparatus for dechucking a workpiece from an electrostatic chuck.
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