首页>
外国专利>
Micro mirror for use in micro-mirror device, has reflection mirror and torsion bars protruding from reflection mirror where carrier frame holds reflection mirror such that reflection mirror rotates over torsion bars around axis of rotation
Micro mirror for use in micro-mirror device, has reflection mirror and torsion bars protruding from reflection mirror where carrier frame holds reflection mirror such that reflection mirror rotates over torsion bars around axis of rotation
The micro mirror (100), has a reflection mirror (1), a pair of torsion bars (4a,4b), which protrude from the reflection mirror, a carrier frame (5), which holds the reflection mirror in such a way that the reflection mirror is rotated over the torsion bars around an axis of rotation (OY). The micro mirror also has a pair of other torsion bars (14a,14b), which protrude from the carrier framework in a direction, which is perpendicular to the direction, in which the former torsion bars are protruding. Another carrier frame (15) holds the former carrier frame in such a way that the former carrier is rotated around the other torsion bars around the other axis of rotation (OX), which is perpendicular to the axis of rotation. The other torsion bars have in each case two separate conductive elements. An independent claim is also included for a micro mirror device.
展开▼
