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Ion e.g. positive ion, balance adjusting method, involves measuring ion balance between positive and negative ions by surface potential sensor in absence of work-piece and before starting removing of charges from work-piece
Ion e.g. positive ion, balance adjusting method, involves measuring ion balance between positive and negative ions by surface potential sensor in absence of work-piece and before starting removing of charges from work-piece
The method involves measuring ion balance between positive and negative ions discharged by an ionizer (1) by a surface potential sensor (2) in an absence of a work-piece and before starting removing of charges from the work-piece. A pulse width of a pulse-shaped high voltage applied by the ionizer to electrode needles is varied depending on the measurement result, where the amount of ions produced by the needles is adjusted to obtain a balance between the positive and the negative ions. An independent claim is also included for a method for removing charges from a work-piece.
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