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Sealing component in processing device, includes high elastic pressure decreasing container containing polymeric material eroding substance useful in plasma treatment technology includes first inner element resistant to eroding material
Sealing component in processing device, includes high elastic pressure decreasing container containing polymeric material eroding substance useful in plasma treatment technology includes first inner element resistant to eroding material
Sealing component (SC) in a substrate processing device which includes a high elastic pressure decreasing container containing a polymeric material eroding substance and in which a predetermined treatment of a substrate (sic) is carried out. The SC seals the inner side of the container relative to the outer side. The SC includes a first element on the container inner side which is resistant to the eroding material and a second element joined to it obtained from the polymeric material and located on the container outside, with a predetermined space between the two elements. An independent claim is included for a substrate processing device as described above.
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