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Opto-electronic measuring method for absolute measurement of gaps/clearances applies two or more stages with different large areas of clearness and different measuring accuracy
Opto-electronic measuring method for absolute measurement of gaps/clearances applies two or more stages with different large areas of clearness and different measuring accuracy
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机译：绝对测量间隙/间隙的光电测量方法适用于两个或多个阶段，具有不同的大净空区域和不同的测量精度
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摘要
Used for measurement from two sources of light with different average wavelengths (~L), light is guided with a probe to a measuring object surface. Reflected light is picked up again and fed to an interferometer with a plane mirror arranged at a slant so as to generate interference bands, which are detected with a line camera. An independent claim is also included for an optoelectronic measuring device for absolute measurement of gaps/clearances in two or more stages with different large areas of clearness and different measuring accuracy.
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