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Projective lens for e.g. optical interferometer, has correction surface compensating non-rotation symmetrical aberration, where plane is pupil plane or pupil near plane of lens, and another plane is field plane or field near plane of lens
Projective lens for e.g. optical interferometer, has correction surface compensating non-rotation symmetrical aberration, where plane is pupil plane or pupil near plane of lens, and another plane is field plane or field near plane of lens
The lens has an optical unit (114) that is angularly vertical to a primary optical axis and defines a plane perpendicular to the axis. A correction surface (111a) is arranged in another plane and non-rotationally symmetrical to the axis, and partially compensates non-rotation symmetrical aberration. One of the planes is a pupil plane or pupil near plane of the lens, and another plane is field plane or field near plane of the lens. Independent claims are also included for the following: (1) a micro lithographic projection illumination arrangement including a projective lens (2) a method for lithographically producing a micro-structured component (3) a micro-structured component produced according to a method for producing a micro-structured component (4) a digital projection system including a projective lens (5) an optical interferometer including a projective lens.
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