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SOLUTION AND THE FABRICATION METHOD FOR PZT SOL-GEL THICK FILM USING COMPOSITE OF HIGHLY CONCENTRATED SOL AND NANO POWDER TREATED IN NITRIC ACID SOLUTION
SOLUTION AND THE FABRICATION METHOD FOR PZT SOL-GEL THICK FILM USING COMPOSITE OF HIGHLY CONCENTRATED SOL AND NANO POWDER TREATED IN NITRIC ACID SOLUTION
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机译：硝酸溶液中高浓度溶胶与纳米粉的复合制备PZT溶胶-凝胶厚膜的溶液及制备方法
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摘要
A sol-gel thick film solution having a high quality, and a method for preparing the sol-gel thick film solution are provided to prevent the generation of crack or the deterioration of density by one heat treating process. A method for preparing a sol-gel thick film solution comprises the steps of adding a Pb(Zr_x Ti_(1-x))O3 (wherein x is 0.3-0.6) (PZT) powder in a nitric acid solution and ball milling it with a zirconia ball to prepare a transparent solution; coating the obtained solution; and heat treating the coated one to form a sol-gel thick film solution. Preferably the amount of PZT is 0.1-0.7 M and the concentration of the nitric acid solution is 0.5-3.0 M. Preferably, the coating process is performed by spin coating method.
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