首页>
外国专利>
FINE MOTION MANIPULATOR WITH THREE JOINTS AND THREE AXES PARALLEL FINE PLANAR MOTION MANIPULATION APPARATUS USING THE SAME
FINE MOTION MANIPULATOR WITH THREE JOINTS AND THREE AXES PARALLEL FINE PLANAR MOTION MANIPULATION APPARATUS USING THE SAME
展开▼
机译：具有三个关节和三个轴的平行细平面运动操纵装置的精动操纵器，使用相同的
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention is comprised of the rotational motion of the joints and joints for fine direction for fine linear motion of the two directions and actuator for the fine drive , as the connection a predetermined number of the fine actuator for driving in parallel to the substrate plane on the 3-axis fine movement parallel operation device to perform fine motion of the three-axis direction in the plane , the three-axis parallel micro- plane motion control device is located in the center thereof with respect to the spatially and three micro- actuator for linear motion and to perform a rotational movement in one direction of the two directions , the three micro- actuator for each other in the plane to which they characterized in that it contains the associated substrate (B). Here, the three micro- actuators are arranged in the driving angle of 120 centered on the substrate .
展开▼
